微锥塔阵列结构表面的非接触光学检测倾斜角度对表面误差.pdf

摘要

随着科学技术的不断发展，测量技术也随着新的物理原理和新的技术成就的不断引入，而获得长足发展。随着计算机技术、光学和光电子技术的迅猛发展，光学三维轮廓测量技术有了极大的改变。光学三维轮廓测量技术具有非接触、高精度、高效率的特点，在机械视觉、自动加工、实物模型、工业检测、生物医学等领域，有着重要的应用价值和广阔的应用前景。

非接触检测采集的离散数据点，都会存在一些噪音，这些噪音对曲面形状恢复有负面影响，不利于曲面匹配和曲面形状误差分析，这些噪音点需要剔除掉。在三维坐标测量曲面数据时，测量坐标系与理论坐标系之间往往不重合，要进行加工曲面形状误差求解，必须进行曲面数据匹配。在非接触检测数据处理过程中，数据配准是十分重要的部分。目前，ICP 算法在配准问题上应用最为普遍。

本课题主要研究非接触光学检测倾斜角度对表面误差影响的关系，经过实例验证和理论分析，我们得出了结论：随着检测角度越来越大误差也越来越大的关系。在60°这是一个分界点，60°前误差都是随着角度的增加而平缓增加的，检测角度到了60°左右这检测误差就会变得很不稳定了，突然有直线上升的趋势。

关键词：三维模拟；曲面匹配；ICP；非接触检测

Abstract

With the continuous development of science and technology, measurement technology with the new physical principles and new technological achievements, the continuous introduction of, and access to substantial development. With computer technology, optics and photonics technology, the rapid development of optical three-dimensional profile measurement techniques have greatly changed. Optical surface profile measurement with non-contact, high precision and high efficiency features in machine vision, automatic processing, physical models, industrial inspection, biomedical and other fields, important application value and application prospect.

The discrete point data collected by the non-contact technology , will exist some noisy ,which can have impact for the recovering of surface ,so not favorable to the surface matching and error analysis ,so the noise must need to remove . When detecting the surface data in the three-dimension coordinate, because often Measurement coordinate system does not coincide with theory coordinate system, we have to match the surface data if we want to analysis the surface error. Nowadays, ICP algorithm is the most common used.

This research project mainly non-contact optical inspection tilt effect on the relationship between the surface error, and validated through theoretical analysis, we come to the conclusion: With the growing point of error detection is also growing relationship. At 60 ° This is a demarcation point, 60 ° angle before the error is increased with the gentle increase in the detection angle to 60 ° around the test error will become very unstable, and suddenly there is a rising trend line.

Key Words: 3D simulation; surface match; ICP; non-contact detection