单晶硅金字塔微结构成型的评价模式研究.pdf

摘要

随着科技的发展，硬脆材料在各个领域的应用越来越广泛。为了紧跟科学发展的形势，在导师的带领下进行了以金字塔微结构成型的评价模式研究为主题的试验。

本论文以单晶硅材料做为试样,磨削加工做出了微金字塔结构，接着通过MATLAB 软件处理其轮廓数据，对成形效果进行分析。把实验记录的数据点通过合理的程序转化为一个三维模型，清晰地展现微结构表面形态；然后计算出最优的拟合球半径，用该球曲面展现金字塔顶部。这些将为微结构功能表面加工精度评价有实际意义。

文中提出了在求球面半径过程中发现的问题和现象，球拟合曲面的分析和评价，可作为后续深入研究，改善成形精度，改进加工工艺的方向。

论文主要分为金字塔结构的可视化与拟合球两个部分，集中阐述了作者利用数据处理软件MATLAB 将抽象的原始数据转化为非常直观的三维图像的过程，并能够利用算法求取与实际金字塔顶部曲面误差最小的拟合球曲面，曲面拟合误差最低达1.5um。

作者很好地利用了白光干涉的特点，通过程序拟合曲面的过程和得到的最佳效果，为微观领域的观测提供了一种思路。

关键词：硬脆材料，金字塔结构，磨削，评价方法

Abstract

With the development of technology, hard and brittle materials were widely applied in all fields. In order to the scientific development of the situation is going, the professor led us to made a experiment what is for the evaluation model about pyramid structure of molding test theme.

In this thesis, the sample is crystal silicon material, using it to made micro-pyramid structure, then we used the "MATLAB" software,to processed data, analysis of the forming effect. Recording data points put into the software and built a three-dimensional model, then it would clearly showing the microstructure morphology;Using of interpolation methods to dealing, showing the fitting spherical surface of the top of the pyramid, These will be of practical significance for the structure and function of the surface micro machining accuracy evaluation.

This paper presents the problems and phenomena, found in the process for the solution with spherical radius; it can be as a follow-up in-depth study, to improve the forming precision, the direction of improved processing technology.

Thesis is divided into two parts, the pyramid structure visualization and fitting the ball,it focused on the data processing. Author use the software of MATLAB to made the process about the abstract raw data transformation an intuitive three-dimensional image.And it can use algorithm to count the top surface and the actual pyramid, the smallest fitting error of the ball surface.

Author was on the good use of white light interference characteristics, With the program obtained to fitting surface and the best resultsand.It’sprovided a new method of micro-field observation

Keyword: Hard and brittle materials, the pyramid structure, grinding, evaluation methods